WebOct 31, 2014 · Abstract: Punch through leakage is a main component of off-state leakage in bulk FinFETs and it is usually suppressed by forming a punch through stop layer (PTSL). With triangular fins being used in 1 st generation FinFET industrial volume production, this paper focuses on PTSL process optimization for FinFETs with triangular-shaped fins. . … http://www.iciba.com/word?w=punch
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Web本发明半导体器件结构及其制备方法,器件结构包括:半导体衬底、形成在半导体衬底中的有源区和隔离结构、栅极结构以及虚拟结构,虚拟结构至少位于相邻有源区之间的隔离结构上,并与栅极结构之间具有间距。本发明通过在相邻有源区之间的隔离结构上制备虚拟结构,并可以进一步延伸至相邻 ... WebDegradation of device characterisitics due to hot-carrier injection in submicrometer PMOSFET has been investigated. We found that in submicrometer p-channel transistors … tractor nederlands
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